Effect of an electric field within microscopy focused ion beam (FIB) between manipulator sharp and the ion trap of the electron detector
Gómez, Jorge Alberto
Pérez Hernández, Antonio
Duarte Moller, José Alberto
"The manipulation of samples with micro manipulators sharps in the normal axis to the observation plane is practically blind in microscopy focused ion beam (FIB) mono beam. The application of a negative potential to the manipulator sharp has been considered, which causes differences of electrical potential between the detector and the sample holder, generating an electric field between the sharp and the sample. This makes the electrons, aside the sample, undergo a greater deflection, reflecting in poorer contrast image. This deflection depends on a great extension of the sample holder height between the micromanipulator sharp, voltage deflector, q/m electron factor and electron acceleration."
KeywordsFocused ion beam (FIB) mono beam